Apertures with Laval Nozzle and Circular Orifice in Secondary Electron Detector for Environmental Scanning Electron Microscope

Authors

  • P. Vyroubal Faculty of Electrical Engineering and Communication, Brno University of Technology
  • J. Maxa Faculty of Electrical Engineering and Communication, Brno University of Technology
  • V. Neděla Institute of Scientific Instruments of the ASCR, v.v.i., Brno
  • J. Jirák Faculty of Electrical Engineering and Communication, Brno University of Technology
  • K. Hladká Faculty of Electrical Engineering and Communication, Brno University of Technology

Keywords:

aperture, Laval nozzle, circular orifice, pressure, detector, Mach number, flow, trajectory of secondary electrons

Abstract

Environmental scanning electron microscopes offer wide possibilities for the exploration of various types of specimens, especially non-conductive and wet specimens containing different material phases. The evaluation of pressure on the secondary electrons trajectory is one of the important parameters in design of scintillation detector of secondary electrons. The final process is influenced by the size and the shape of the apertures used to separate areas with different pressure gradient. This article is focused on the comparison of the aperture with circular orifice and aperture with Laval nozzle.

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Published

18-02-2022

Issue

Section

Research Paper

How to Cite

Vyroubal, P., Maxa, J., Neděla, V., Jirák, J., & Hladká, K. (2022). Apertures with Laval Nozzle and Circular Orifice in Secondary Electron Detector for Environmental Scanning Electron Microscope. Advances in Military Technology, 8(1), 59-69. https://www.aimt.cz/index.php/aimt/article/view/1573

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