Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM

Authors

  • Pavla Hlavatá Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
  • Jiří Maxa Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
  • Michal Bílek Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
  • Kristýna Lepltová Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
  • Petr Vyroubal Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic
  • Robert Bayer Department of Electrical and Electronic Technology, Faculty of Electrical Engineering and Communication, Brno University of Technology, Czech Republic

DOI:

https://doi.org/10.3849/aimt.01201

Keywords:

Ansys Fluent, differentially pumped chamber, ESEM, SolidWorks

Abstract

The article deals with the effect of the critical flow, which is examined at pumping of the differential pumping chamber of the Environmental Scanning Electron Microscope (ESEM). The article compares the state of the flow in the area of pumped chamber at
pressure ratio on the apertures when the critical flow occurs and its advantages in design of the chambers versus the flow without the clogging the nozzle. Problematics were solved using finite volume method by Ansys Fluent system.

References

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Published

08-12-2017

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Research Paper

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How to Cite

Influence of Critical Flow in the Differentially Pumped Chamber AQUASEM. (2017). Advances in Military Technology, 12(2), 301-310. https://doi.org/10.3849/aimt.01201

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